MSE 227: Nanoscale Characterization Techniques

← 2010-11 2011-12 2012-13 →
← 2010-11 changes (lax) changes (strict) ▾ 2012-13 → 2012-13 →

Units: 4

Hours: Lecture, 3 hours; laboratory, 3 hours

Catalog page 331

Prerequisites: EE 201/MSE 207, EE 202/MSE 217, EE 203/MSE 237C; or consent of instructor

Description: An in-depth study of nanoscale materials and device characterization tech- niques. Laboratory emphasizes atomic force microscopy (AFM) and scanning tunneling microscopy (STM). Topics include semiconductor fab- rication fundamentals; metrology requirements; in situ monitoring; interconnects and failure analysis; princi- ples of AFM, STM, and scanning electron microscopy; X-ray methods; optical and infrared techniques; and electrical characterization.

Cross-listing: Cross-listed with EE 206.

Derived Information — The following is not part of the official catalog but is computed from catalog data.
Prerequisite graph not available.
Enrollment History (from UCR Banner, not catalog)
Combined: EE 206 / MSE 227 / MSE 227A
Year F W S Su Total
2025-26 13/30 13/30
2024-25 13/30 13/30
2023-24 19/30 19/30
2022-23 10/30 10/30
2021-22 13/30 13/30
2020-21 22/30 22/30
2019-20 13/30 13/30
2018-19 21/30 21/30
2017-18 20/30 20/30
2016-17 27/30 27/30