MSE 141: Introduction to Microelectromechanical Systems (MEMS) Technology

2024-25 2025-26 →
changes (lax) changes (strict) ▾ 2025-26 →

Units: 4

Hours: Lecture, 3 hours; laboratory, 3 hours

Catalog page 470

Prerequisites: MSE 001; restricted to class level standing of junior, or senior; or consent of instructor

Description: Covers the fundamentals of MEMS technology including MEMS device design, fabrication, and characterization. Provides hands-on experience in crafting real MEMS devices from initial design to the prototyping stage.

Cross-listing: Cross-listed with ME 151.

Derived Information — The following is not part of the official catalog but is computed from catalog data.
Prerequisite graph not available.