Prerequisites: ME 110, ME 114, or equivalents
Description: An introduction to the design and fabrication of microelectromechanical systems (MEMS). Topics include micromachining processes; material properties; transduction; applications in mechanical, thermal, optical, radiation, and biological sensors and actuators; microfluidic devices; Bio- MEMS and applications; packaging and reliability concepts; and metrology techniques for MEMS.
Cross-listing: Cross-listed with ME 270.