Prerequisites: ME 110, ME 114, or equivalents
Description: An introduction to the design and fabrication of microelectromechanical systems (MEMS). Topics include micromachining processes; material properties; transduction; applications in mechanical, thermal, optical, radiation, and biological sensors and actuators; microfluidic devices; Bio- MEMS and applications; packaging and reliability con- cepts; and metrology techniques for MEMS. Cross-list- ed with ME 270.