Prerequisites: ME 110, ME 114, or equivalents
Description: An introduction to the design and fabrication of microelectromechanical sys- tems (MEMS). Topics include bulk and surface micro- machining processes; material properties; mecha- nisms of transduction; applications in mechanical, thermal, optical, radiation, and biological sensors and actuators; fabrication of microfluidic devices; Bio- MEMS and applications; packaging and reliability con- cepts; and metrology techniques for MEMS. Also dis- cusses directions for future research.